Sulfur hexafluoride - Wikipedia hexafluoride (SF 6) or sulphur hexafluoride (British spelling), is an inorganic, colorless, odorless, non-flammable, non-toxic but extremely potent greenhouse gas, and an excellent electrical insulator. SF 6 has an octahedral geometry, consisting of six fluorine atoms attached to a central sulfur atom.
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Get Pricetif sulfur hexafluoride density sensor costSF6 is applied in the above process as an etching gas. Due to the density and large molecule size, SF6 is a preferred etching gas in flat panel and MEMS production processes. Fluorinated gases, such as Sulfur Hexafluoride (SF6), play very important roles in the manufacturing of silicon devices.
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Get PriceSulfur hexafluoride SF6 gas hazards. Sulfur hexafluoride (SF6) is colorless, odorless, heavier than air and is not considered as toxic.However it is suffocating at high concentrations (it replaces oxygen) just like inert gases (also called noble gases). Sulfur hexafluoride has no lower and upper explosive limits but can severely react with disilane and form a dangerous explosive gas mixture.
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